Robotic Inspection

Enhancing thin-film wafer inspection with a multi-sensor array and robot constraint maintenance

Robotic inspection systems can be used for thin-film wafer inspection. These systems perform constrained tasks repeatedly, which can be investigated and monitored.

Néstor Sánchez-Arriaga, Eytan Canzini, Nathan Plumb, Michael Farnsworth, Simon Pope, Adrian Leyland, Ashutosh Tiwari